Investigation of Ti/TiN multilayered films in a reactive mid-frequency dual-magnetron sputtering

✍ Scribed by Yu Xiang; Meng Hua; Wang Cheng-biao; Fu Zhi-qiang; Liu Yang

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 516 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2006.08.002