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Electrostatic fluctuations in a direct current magnetron sputtering plasma

✍ Scribed by Martines, E.; Cavazzana, R.; Serianni, G.; Spolaore, M.; Tramontin, L.; Zuin, M.; Antoni, V.


Book ID
121290366
Publisher
American Institute of Physics
Year
2001
Tongue
English
Weight
756 KB
Volume
8
Category
Article
ISSN
1070-664X

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