✦ LIBER ✦

Plasma diagnostics of an Ar/NH3 direct-current reactive magnetron sputtering discharge for SiNx deposition

✍ Scribed by F. Henry; C.Y. Duluard; A. Batan; F. Reniers

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Diagnostics of a N[sub 2]/Ar direct curr

✍ Neidhardt, J.; Hultman, L.; Abendroth, B.; Gago, R.; MoÌller, W. 📂 Article 📅 2003 🏛 American Institute of Physics 🌐 English ⚖ 393 KB

Plasma diagnostics by energy resolved qu

✍ K. Ellmer; D. Lichtenberger 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 562 KB