Plasma diagnostics by energy resolved quadrupole mass spectrometry of a reactive magnetron sputtering discharge from an Fe target in ArH2S atmospheres

✍ Scribed by K. Ellmer; D. Lichtenberger

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 562 KB
• Volume: 74-75
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(95)08260-3