Diagnostics of a N[sub 2]/Ar direct current magnetron discharge for reactive sputter deposition of fullerene-like carbon nitride thin films

✍ Scribed by Neidhardt, J.; Hultman, L.; Abendroth, B.; Gago, R.; Möller, W.

• Book ID: 121265249
• Publisher: American Institute of Physics
• Year: 2003
• Tongue: English
• Weight: 393 KB
• Volume: 94
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1625091