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Transition between the discharge regimes of high power impulse magnetron sputtering and conventional direct current magnetron sputtering

✍ Scribed by Lundin, Daniel; Brenning, Nils; Jädernäs, Daniel; Larsson, Petter; Wallin, Erik; Lattemann, Martina; Raadu, Michael A; Helmersson, Ulf

No coin nor oath required. For personal study only.

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