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Transport and ionization of sputtered atoms in high-power impulse magnetron sputtering discharges

✍ Scribed by Kozák, Tomáš; Vlček, Jaroslav; Kos, Šimon

Book ID: 120777909
Publisher: Institute of Physics
Year: 2013
Tongue: English
Weight: 258 KB
Volume: 46
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/46/10/105203

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