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Plasma self-organisation in High Power Impulse Magnetron Sputtering Discharges

✍ Scribed by Ehiasarian, A P; Hecimovic, A; Winter, J; Arcos, T de los; New, R; Gathen, V Schulz-von der; Böke, M

Book ID: 121439169
Publisher: IOP Publishing
Year: 2012
Weight: 765 KB
Volume: 39
Category: Article
ISSN: 1757-8981
DOI: 10.1088/1757-899X/39/1/012012

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