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Plasma “anti-assistance” and “self-assistance” to high power impulse magnetron sputtering

✍ Scribed by Anders, André; Yushkov, Georgy Yu.

Book ID: 121751371
Publisher: American Institute of Physics
Year: 2009
Tongue: English
Weight: 617 KB
Volume: 105
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.3097390

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