✦ LIBER ✦
Self-sputtering runaway in high power impulse magnetron sputtering: The role of secondary electrons and multiply charged metal ions
✍ Scribed by Anders, AndreÌ
- Book ID
- 120198488
- Publisher
- American Institute of Physics
- Year
- 2008
- Tongue
- English
- Weight
- 218 KB
- Volume
- 92
- Category
- Article
- ISSN
- 0003-6951
No coin nor oath required. For personal study only.