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Evaporation-assisted high-power impulse magnetron sputtering: The deposition of tungsten oxide as a case study

✍ Scribed by Hemberg, Axel; Dauchot, Jean-Pierre; Snyders, Rony; Konstantinidis, Stephanos


Book ID
121752159
Publisher
AVS (American Vacuum Society)
Year
2012
Tongue
English
Weight
436 KB
Volume
30
Category
Article
ISSN
0734-2101

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