✦ LIBER ✦
Improving optical properties of silicon nitride films to be applied in the middle infrared optics by a combined high-power impulse/unbalanced magnetron sputtering deposition technique
✍ Scribed by Liao, Bo-Huei ;Hsiao, Chien-Nan
- Book ID
- 124084197
- Publisher
- The Optical Society
- Year
- 2014
- Tongue
- English
- Weight
- 620 KB
- Volume
- 53
- Category
- Article
- ISSN
- 1559-128X
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