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An ionization region model for high-power impulse magnetron sputtering discharges

✍ Scribed by Raadu, M A; Axnäs, I; Gudmundsson, J T; Huo, C; Brenning, N

Book ID: 121311252
Publisher: Institute of Physics
Year: 2011
Tongue: English
Weight: 727 KB
Volume: 20
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/20/6/065007

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