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Ion composition produced by high power impulse magnetron sputtering discharges near the substrate

✍ Scribed by Ehiasarian, A. P.; Vetushka, A.; Hecimovic, A.; Konstantinidis, S.

Book ID: 120198490
Publisher: American Institute of Physics
Year: 2008
Tongue: English
Weight: 662 KB
Volume: 104
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.3000446

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