Dynamic Study of Dual High-Power Impulse Magnetron Sputtering Discharge by Optical Emission Imaging

✍ Scribed by Stranak, V.; Bogdanowicz, R.; Drache, S.; Cada, M.; Hubicka, Z.; Hippler, R.

• Book ID: 118039879
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 156 KB
• Volume: 39
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/tps.2011.2155674