✦ LIBER ✦

On the electron energy in the high power impulse magnetron sputtering discharge

✍ Scribed by Gudmundsson, J. T.; Sigurjonsson, P.; Larsson, P.; Lundin, D.; Helmersson, U.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Anomalous electron transport in high pow

✍ Lundin, Daniel; Helmersson, Ulf; Kirkpatrick, Scott; Rohde, Suzanne; Brenning, N 📂 Article 📅 2008 🏛 Institute of Physics 🌐 English ⚖ 859 KB

Energy flux measurements in high power i

✍ Lundin, Daniel; Stahl, Marc; Kersten, Holger; Helmersson, Ulf 📂 Article 📅 2009 🏛 Institute of Physics 🌐 English ⚖ 302 KB

Plasma self-organisation in High Power I

✍ Ehiasarian, A P; Hecimovic, A; Winter, J; Arcos, T de los; New, R; Gathen, V Sch 📂 Article 📅 2012 🏛 IOP Publishing ⚖ 765 KB

Transition between the discharge regimes

✍ Lundin, Daniel; Brenning, Nils; Jädernäs, Daniel; Larsson, Petter; Wallin, Erik; 📂 Article 📅 2009 🏛 Institute of Physics 🌐 English ⚖ 167 KB

Transport and ionization of sputtered at

✍ Kozák, Tomáš; Vlček, Jaroslav; Kos, Šimon 📂 Article 📅 2013 🏛 Institute of Physics 🌐 English ⚖ 258 KB

On the film density using high power imp

✍ Mattias Samuelsson; Daniel Lundin; Jens Jensen; Michael A. Raadu; Jon Tomas Gudm 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 642 KB