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Energy flux measurements in high power impulse magnetron sputtering

✍ Scribed by Lundin, Daniel; Stahl, Marc; Kersten, Holger; Helmersson, Ulf

Book ID: 121440598
Publisher: Institute of Physics
Year: 2009
Tongue: English
Weight: 302 KB
Volume: 42
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/42/18/185202

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