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High power impulse magnetron sputtering using a rotating cylindrical magnetron

โœ Scribed by Leroy, W. P.; Mahieu, S.; Depla, D.; Ehiasarian, A. P.


Book ID
121752157
Publisher
AVS (American Vacuum Society)
Year
2010
Tongue
English
Weight
407 KB
Volume
28
Category
Article
ISSN
0734-2101

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