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Internal current measurements in high power impulse magnetron sputtering

✍ Scribed by Lundin, Daniel; Sahab, Seham Al; Brenning, Nils; Huo, Chunqing; Helmersson, Ulf


Book ID
121437758
Publisher
Institute of Physics
Year
2011
Tongue
English
Weight
772 KB
Volume
20
Category
Article
ISSN
0963-0252

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