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Time-resolved Langmuir probe investigation of hybrid high power impulse magnetron sputtering discharges

✍ Scribed by Drache, Steffen; Stranak, Vitezslav; Herrendorf, Ann-Pierra; Cada, Martin; Hubicka, Zdenek; Tichy, Milan; Hippler, Rainer

Book ID: 119950796
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 710 KB
Volume: 90
Category: Article
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2012.02.047

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