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Highly ionized fluxes of sputtered titanium atoms in high-power pulsed magnetron discharges

✍ Scribed by Kudláček, P; Vlček, J; Burcalová, K; Lukáš, J

Book ID: 119956261
Publisher: Institute of Physics
Year: 2008
Tongue: English
Weight: 534 KB
Volume: 17
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/17/2/025010

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