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On the deposition rate in a high power pulsed magnetron sputtering discharge

✍ Scribed by Alami, J.; Sarakinos, K.; Mark, G.; Wuttig, M.

Book ID: 121311150
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 328 KB
Volume: 89
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2362575

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