✦ LIBER ✦
Deposition rate characteristics for steady state high power impulse magnetron sputtering (HIPIMS) discharges generated with a modulated pulsed power (MPP) generator
✍ Scribed by F. Papa; H. Gerdes; R. Bandorf; A.P. Ehiasarian; I. Kolev; G. Braeuer; R. Tietema; T. Krug
- Book ID
- 113937258
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 669 KB
- Volume
- 520
- Category
- Article
- ISSN
- 0040-6090
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