✦ LIBER ✦

Ion flux characteristics in high-power pulsed magnetron sputtering discharges

✍ Scribed by Vlček, J; Kudláček, P; Burcalová, K; Musil, J

Book ID: 121311507
Publisher: EDP Sciences
Year: 2007
Tongue: English
Weight: 372 KB
Volume: 77
Category: Article
ISSN: 0295-5075
DOI: 10.1209/0295-5075/77/45002

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Highly ionized fluxes of sputtered titan

Highly ionized fluxes of sputtered titanium atoms in high-power pulsed magnetron discharges

✍ Kudláček, P; Vlček, J; Burcalová, K; Lukáš, J 📂 Article 📅 2008 🏛 Institute of Physics 🌐 English ⚖ 534 KB

Ion-acoustic solitary waves in a high po

Ion-acoustic solitary waves in a high power pulsed magnetron sputtering discharge

✍ Gylfason, K B; Alami, J; Helmersson, U; Gudmundsson, J T 📂 Article 📅 2005 🏛 Institute of Physics 🌐 English ⚖ 825 KB

Investigation of ionized metal flux in e

Investigation of ionized metal flux in enhanced high power impulse magnetron sputtering discharges

✍ Stranak, Vitezslav; Hubicka, Zdenek; Cada, Martin; Drache, Steffen; Tichy, Milan 📂 Article 📅 2014 🏛 American Institute of Physics 🌐 English ⚖ 856 KB

Electron energy distributions and plasma

Electron energy distributions and plasma parameters in high-power pulsed magnetron sputtering discharges

✍ Pajdarová, A D; Vlček, J; Kudláček, P; Lukáš, J 📂 Article 📅 2009 🏛 Institute of Physics 🌐 English ⚖ 449 KB

High-Power Pulsed Magnetron Sputtering G

High-Power Pulsed Magnetron Sputtering Glow Plasma in Argon Gas and Pulsed Ion Extraction

✍ Jing, Fengjuan; Yukimura, Ken; Hara, Shiro; Nakano, Shizuka; Ogiso, Hisato; Huan 📂 Article 📅 2010 🏛 IEEE 🌐 English ⚖ 630 KB

Ion fluxes in medium frequency pulsed DC

Ion fluxes in medium frequency pulsed DC magnetron sputtering

✍ M. Rahamathunnisa; D.C. Cameron 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 346 KB