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Tomographic imagings of a plasma structure and sputtered particle in a direct current magnetron discharge

✍ Scribed by Itoh, A.; Makabe, T.; Shimura, N.; Tougo, S.


Book ID
117862732
Publisher
IEEE
Year
1996
Tongue
English
Weight
203 KB
Volume
24
Category
Article
ISSN
0093-3813

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