✦ LIBER ✦
A comparative study of CoZrNb and NiFe targets in discharge and sputtering using plasma confining type of magnetron sputtering method
✍ Scribed by Takahashi, T.; Ikeda, N.; Naoe, M.
- Book ID
- 114546516
- Publisher
- IEEE
- Year
- 1990
- Tongue
- English
- Weight
- 338 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0018-9464
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