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Influence of microstructure on residual stress in tungsten thin films analyzed by X-ray diffraction

✍ Scribed by N. Durand; K.F. Badawi; Ph. Goudeau

Book ID: 107864911
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 395 KB
Volume: 275
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(96)80096-4

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