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Residual stress determination by X-ray diffraction in tungsten thin films

✍ Scribed by K.F. Badawi; A. Naudon; Ph. Goudeau

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 535 KB
Volume: 65-66
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(93)90642-o

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