## Abstract Ionβplatted thin copper films were examined for residual stresses and texture by Xβray diffraction. The complete orientation distribution functions were determined and sharp (111)βfibre textures were found. The strains were measured by grazing incidence diffraction. The stress tensors w
β¦ LIBER β¦
Residual stress measurement in textured thin film by grazing-incidence X-ray diffraction
β Scribed by C.-H. Ma; J.-H. Huang; Haydn Chen
- Book ID
- 108388480
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 139 KB
- Volume
- 418
- Category
- Article
- ISSN
- 0040-6090
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