Determination of Stress Tensors in thin textured copper films by grazing incidence diffraction

✍ Scribed by Dipl.-Ing. J. Zendehroud; Dr. Th. Wieder; Dr. H. Klein

• Publisher: John Wiley and Sons
• Year: 1995
• Tongue: English
• Weight: 753 KB
• Volume: 26
• Category: Article
• ISSN: 0933-5137
• DOI: 10.1002/mawe.19950261012

✦ Synopsis

Abstract

Ion‐platted thin copper films were examined for residual stresses and texture by X‐ray diffraction. The complete orientation distribution functions were determined and sharp (111)‐fibre textures were found. The strains were measured by grazing incidence diffraction. The stress tensors were calculated using both texture‐weighted elastic compliances and texture‐independent X‐ray elastic constants. The importance of the texture measurement for the stress tensor determination is discussed. The found stresses can be interpreted as thermally induced.