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Influence of fabrication parameters on crystallization, microstructure, and surface composition of NbN thin films deposited by rf magnetron sputtering

✍ Scribed by J. E. Alfonso; J. Buitrago; J. Torres; J. F. Marco; B. Santos

Publisher
Springer
Year
2010
Tongue
English
Weight
448 KB
Volume
45
Category
Article
ISSN
0022-2461

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πŸ“œ SIMILAR VOLUMES

Crystallographic structure and surface c
Crystallographic structure and surface composition of thin films grown by RF magnetron sputtering
✍ J.E. Alfonso; J. Buitrago; J. Torres; B. Santos; J.F. Marco πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 177 KB

In this work we report on the results obtained on NbN x thin films grown on both common glass and silicon wafer substrates by RF magnetron sputtering at different substrate temperatures and different target power supplies. The crystalinity, morphology and surface composition of the deposited films h