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The influence of YSZ interlayer on microstructures and dielectric properties of BST thin films prepared by RF magnetron sputtering

✍ Scribed by Tianjin Zhang; Jinzhao Wang; Baishun Zhang; Juan Jiang; Runkun Pan; Jun He

Publisher
Springer US
Year
2007
Tongue
English
Weight
266 KB
Volume
18
Category
Article
ISSN
0957-4522

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The (Pb 0.90 La 0.10 )Ti 0.975 O 3 (PLT) thin films with different thicknesses of PbO x buffer layers were deposited on the Pt(111)/Ti/SiO 2 /Si(100) substrates by RF magnetron sputtering technique. The PbO x buffer layer leads to the (100) orientation of the PLT thin films. Effects of the PbO x thi