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Microstructure, optical and dielectric properties of compositional graded (Ba,Sr)TiO3thin films derived by RF magnetron sputtering

โœ Scribed by Jun Wang; Junhuai Xiang; Shuwang Duo; Wenkui Li; Mingsheng Li; Lingyun Bai

Publisher
Springer US
Year
2008
Tongue
English
Weight
234 KB
Volume
20
Category
Article
ISSN
0957-4522

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## Abstract Ba~0.6~Sr~0.4~TiO~3~ (BST) thin films with the thickness of 300 nm were deposited on Pt/SiO~2~/Si substrates at various deposition temperatures by RF magnetron sputtering technique, and their electric properties were investigated. Due to the high temperature annealing process at substra