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Study on dielectric and tunable properties of Cr-doped Ba0.6Sr0.4TiO3thin films by rf sputtering

โœ Scribed by Mei-feng Hu; Yue Zhuo; Sheng-xiang Wang; Yu Tian

Publisher
Springer
Year
2008
Tongue
English
Weight
331 KB
Volume
43
Category
Article
ISSN
0022-2461

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## Abstract Ba~0.6~Sr~0.4~TiO~3~ (BST) thin films with the thickness of 300 nm were deposited on Pt/SiO~2~/Si substrates at various deposition temperatures by RF magnetron sputtering technique, and their electric properties were investigated. Due to the high temperature annealing process at substra