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The Electrical and Optical Properties of the ZnO-SnO2 Thin Films Prepared by RF Magnetron Sputtering

✍ Scribed by Enoki, H. ;Nakayama, T. ;Echigoya, J.


Publisher
John Wiley and Sons
Year
1992
Tongue
English
Weight
479 KB
Volume
129
Category
Article
ISSN
0031-8965

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ZnO thin films were deposited on corning glass substrates by RF magnetron sputtering at room temperature. The dependence of crystal structure, morphology and optical properties on postdeposition annealing was investigated using XRD, AFM and UV-vis Spectrophotometer. The asdeposited films were amorph