Electrical and Optical Properties of Copper Oxide Films Prepared by Reactive RF Magnetron Sputtering
β Scribed by Parretta, A. ;Jayaraj, M. K. ;Di Nocera, A. ;Loreti, S. ;Quercia, L. ;Agati, A.
- Publisher
- John Wiley and Sons
- Year
- 1996
- Tongue
- English
- Weight
- 261 KB
- Volume
- 155
- Category
- Article
- ISSN
- 0031-8965
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π SIMILAR VOLUMES
Polycrystalline Zn 3 N 2 films are prepared on Si and quartz glass substrates by RF magnetron sputtering at room temperature. The structural and optical properties are studied by X-ray diffraction and double beam spectrophotometer, respectively. X-ray diffraction indicates that the Zn 3 N 2 films de
Thin films of ZrO 2 were prepared by reactive magnetron sputtering. Annealing of the films exhibited a drastic change in the properties due to improved crystallinity and packing density. The root mean square roughness of the sample observed from atomic force microscope is about 5.75 nm which is comp