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Influence of deposition parameters on preferred orientation of RF magnetron sputtered BST thin films

✍ Scribed by Songzhan Li; Yanqin Yang; L. Liu; T. J. Zhang; W. H. Huang

Publisher: Springer US
Year: 2007
Tongue: English
Weight: 207 KB
Volume: 19
Category: Article
ISSN: 0957-4522
DOI: 10.1007/s10854-007-9270-0

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