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Nitrogen doping of SiC thin films deposited by RF magnetron sputtering

✍ Scribed by Mariana Amorim Fraga; Marcos Massi; Ivo C. Oliveira; Homero S. Maciel; Sebastião G. dos Santos Filho; Ronaldo D. Mansano

Publisher: Springer US
Year: 2007
Tongue: English
Weight: 941 KB
Volume: 19
Category: Article
ISSN: 0957-4522
DOI: 10.1007/s10854-007-9487-y

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