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Crystallographic structure and surface composition of thin films grown by RF magnetron sputtering

✍ Scribed by J.E. Alfonso; J. Buitrago; J. Torres; B. Santos; J.F. Marco

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 177 KB
Volume: 39
Category: Article
ISSN: 0026-2692
DOI: 10.1016/j.mejo.2008.01.027

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✦ Synopsis

In this work we report on the results obtained on NbN x thin films grown on both common glass and silicon wafer substrates by RF magnetron sputtering at different substrate temperatures and different target power supplies. The crystalinity, morphology and surface composition of the deposited films have been characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS), respectively.

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