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Substrate-temperature dependent structure and composition variations in RF magnetron sputtered titanium nitride thin films

✍ Scribed by K. Vasu; M. Ghanashyam Krishna; K.A. Padmanabhan

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 764 KB
Volume: 257
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2010.10.118

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