✦ LIBER ✦

Inductively coupled plasma reactive ion etching of SiC single crystals using NF3-based gas mixtures

✍ Scribed by Hyun-Joon Choi; Byung-Teak Lee

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Inductively coupled plasma reactive ion

✍ Dong-Jin Kang; Il-Soo Kim; Jong-Ha Moon; Byung-Teak Lee 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 698 KB

A study on the reactive ion etching of S

✍ S. C. Ahn; S. Y. Han; J. L. Lee; J. H. Moon; B. T. Lee 📂 Article 📅 2004 🏛 TechnoPress 🌐 English ⚖ 262 KB

Etching of 4H-SiC using a NF3inductively

✍ Byungwhan Kim; Byung-Teak Lee 📂 Article 📅 2004 🏛 Springer US 🌐 English ⚖ 464 KB

Reactive ion etching of SiC using C2F6/O

✍ S. -M. Kong; H. -J. Choi; B. -T. Lee; S. -Y. Han; J. L. Lee 📂 Article 📅 2002 🏛 Springer US 🌐 English ⚖ 149 KB

Study of dry etching for GaN and InGaN-b

✍ Chih-Chiang Kao; H.W Huang; J.Y Tsai; C.C Yu; C.F Lin; H.C Kuo; S.C Wang 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 344 KB

Fabrication of GaN-based nanorod light e

✍ Hung-Wen Huang; Chih-Chiang Kao; Tao-Hung Hsueh; Chang-Chin Yu; Chia-Feng Lin; J 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 190 KB