✦ LIBER ✦

In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al[sub 2]O[sub 3]

✍ Scribed by Heil, S. B. S.; Kudlacek, P.; Langereis, E.; Engeln, R.; van de Sanden, M. C. M.; Kessels, W. M. M.

Book ID: 127116561
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 415 KB
Volume: 89
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2357886

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Plasma-assisted atomic layer deposition

Plasma-assisted atomic layer deposition of Al[sub 2]O[sub 3] moisture permeation barriers on polymers

✍ Langereis, E.; Creatore, M.; Heil, S. B. S.; van de Sanden, M. C. M.; Kessels, W 📂 Article 📅 2006 🏛 American Institute of Physics 🌐 English ⚖ 307 KB

Transport mechanisms in atomic-layer-dep

Transport mechanisms in atomic-layer-deposited Al[sub 2]O[sub 3] dielectrics

✍ Specht, M.; StaÌdele, M.; Jakschik, S.; SchroÌder, U. 📂 Article 📅 2004 🏛 American Institute of Physics 🌐 English ⚖ 313 KB

Ultralow surface recombination of c-Si s

Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al[sub 2]O[sub 3]

✍ Hoex, B.; Heil, S. B. S.; Langereis, E.; van de Sanden, M. C. M.; Kessels, W. M. 📂 Article 📅 2006 🏛 American Institute of Physics 🌐 English ⚖ 507 KB

TiO[sub 2]∕Al[sub 2]O[sub 3]∕TiO[sub 2]

TiO[sub 2]∕Al[sub 2]O[sub 3]∕TiO[sub 2] Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition

✍ Jeon, Woojin; Chung, Hoi-Sung; Joo, Daekwon; Kang, Sang-Won 📂 Article 📅 2008 🏛 The Electrochemical Society 🌐 English ⚖ 307 KB

Gas diffusion barriers on polymers using

Gas diffusion barriers on polymers using Al[sub 2]O[sub 3] atomic layer deposition

✍ M. D. Groner; S. M. George; R. S. Mclean; P. F. Carcia 📂 Article 📅 2006 🏛 American Institute of Physics 🌐 English ⚖ 259 KB

Interface effect on dielectric constant

Interface effect on dielectric constant of HfO[sub 2]∕Al[sub 2]O[sub 3] nanolaminate films deposited by plasma-enhanced atomic layer deposition

✍ Park, Pan Kwi; Cha, Eun-Soo; Kang, Sang-Won 📂 Article 📅 2007 🏛 American Institute of Physics 🌐 English ⚖ 460 KB