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Improved surface morphology and mobility of AlGaN/GaN HEMT grown on silicon substrate

✍ Scribed by Xueliang Zhu; Jun Ma; Tongde Huang; Ming Li; Ka Ming Wong; Kei May Lau


Book ID
112182317
Publisher
John Wiley and Sons
Year
2011
Tongue
English
Weight
710 KB
Volume
9
Category
Article
ISSN
1862-6351

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Large Area AlGaN/GaN HEMTs Grown on Insu
✍ Lossy, R. ;Chaturvedi, N. ;Heymann, P. ;WοΏ½rfl, J. ;MοΏ½ller, S. ;KοΏ½hler, K. πŸ“‚ Article πŸ“… 2002 πŸ› John Wiley and Sons 🌐 English βš– 94 KB πŸ‘ 2 views

Large periphery Al 0.25 Ga 0.75 N/GaN-HEMTs on SiC-substrates are fabricated on a 2-inch process line using stepper lithography. DC characteristics reveal current densities above 1.2 A/mm and intrinsic transconductances of 360 mS/mm. Depending on device size the maximum frequency of oscillation f ma