Large Area AlGaN/GaN HEMTs Grown on Insu
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Lossy, R. ;Chaturvedi, N. ;Heymann, P. ;WοΏ½rfl, J. ;MοΏ½ller, S. ;KοΏ½hler, K.
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Article
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2002
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John Wiley and Sons
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English
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Large periphery Al 0.25 Ga 0.75 N/GaN-HEMTs on SiC-substrates are fabricated on a 2-inch process line using stepper lithography. DC characteristics reveal current densities above 1.2 A/mm and intrinsic transconductances of 360 mS/mm. Depending on device size the maximum frequency of oscillation f ma