Improved Electronic Performance of HfO2/ SiO2 Stacking Gate Dielectric on 4H SiC

✍ Scribed by Kuan Yew Cheong; Jeong Hyun Moon; Tae Joo Park; Jeong Hwan Kim; Cheol Seong Hwang; Hyeong Joon Kim; Wook Bahng; Nam-Kyun Kim

• Book ID: 114618984
• Publisher: IEEE
• Year: 2007
• Tongue: English
• Weight: 681 KB
• Volume: 54
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2007.908545