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[IEEE Seventh International IEEE Conference on VLSI Multilevel Interconnection - Santa Clara, CA, USA (12-13 June 1990)] Seventh International IEEE Conference on VLSI Multilevel Interconnection - Characterization and simulation of PECVD and APCVD oxide step coverage

✍ Scribed by Lesaicherre, P.-Y.; Gerodolle, A.; Brouquet, P.; Rossiter, N.

Book ID: 121221061
Publisher: IEEE
Year: 1990
Weight: 689 KB
Category: Article
DOI: 10.1109/VMIC.1990.127860

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