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[IEEE Seventh International IEEE Conference on VLSI Multilevel Interconnection - Santa Clara, CA, USA (12-13 June 1990)] Seventh International IEEE Conference on VLSI Multilevel Interconnection - Electron cyclotron resonance (ECR) deposited SiO/sub 2/ films for interlayer dielectric application

✍ Scribed by Chiang, C.; Fraser, D.B.; Denison, D.R.

Book ID: 120070549
Publisher: IEEE
Year: 1990
Weight: 148 KB
Category: Article
DOI: 10.1109/VMIC.1990.127905

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