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[IEEE Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (12-13 June 1989)] Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Shadow step structures for the analysis of thin film conductors

✍ Scribed by Rosvold, W.C.

Book ID: 121282423
Publisher: IEEE
Year: 1989
Weight: 628 KB
Category: Article
DOI: 10.1109/VMIC.1989.78031

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