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[IEEE 1991 Eighth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (11-12 June 1991)] 1991 Proceedings Eighth International IEEE VLSI Multilevel Interconnection Conference - A highly reliable multilevel interconnection process for 0.6 mu m CMOS devices

✍ Scribed by Takata, Y.; Ishii, A.; Matsuura, M.; Ohsaki, A.; Iwasaki, M.; Miyazaki, J.; Fujiwara, N.; Komori, J.; Katayama, T.; Nakao, S.; Kotani, H.

Book ID: 120567356
Publisher: IEEE
Year: 1991
Weight: 484 KB
Category: Article
ISBN-13: 9780879426736
DOI: 10.1109/VMIC.1991.152960

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