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[IEEE ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures - Monterey, CA, USA (13-16 March 2000)] ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095) - Optimization of low-k dielectric (fluorinated SiO/sub 2/) process and evaluation of yield impact by using BEOL test structures

✍ Scribed by Sunnys Hsieh, ; Doong, K.Y.-Y.; Yen-Hsuan Ho, ; Sheng-Che Lin, ; Binson Shen, ; Sing-Mo Tseng, ; Yeu-Haw Yang, ; Hsu, C.C.-H.

Book ID: 126623364
Publisher: IEEE
Year: 2000
Weight: 408 KB
Category: Article
DOI: 10.1109/ICMTS.2000.844432

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