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[IEEE 2008 IEEE International Conference on Microelectronic Test Structure (ICMTS) - Edinburgh, UK (2008.03.24-2008.03.27)] 2008 IEEE International Conference on Microelectronic Test Structures - On-mask mismatch resistor structures for the characterisation of maskmaking capability

✍ Scribed by Smith, S.; Tsiamis, A.; McCallumt, M.; Hourdt, A. C.; Stevenson, J. T. M.; Walton, A. J.; Enderling, S.

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